JPH01136166U - - Google Patents
Info
- Publication number
- JPH01136166U JPH01136166U JP2828088U JP2828088U JPH01136166U JP H01136166 U JPH01136166 U JP H01136166U JP 2828088 U JP2828088 U JP 2828088U JP 2828088 U JP2828088 U JP 2828088U JP H01136166 U JPH01136166 U JP H01136166U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- wafer carrier
- nozzle
- tank
- etching tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000001039 wet etching Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2828088U JPH01136166U (en]) | 1988-03-02 | 1988-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2828088U JPH01136166U (en]) | 1988-03-02 | 1988-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01136166U true JPH01136166U (en]) | 1989-09-18 |
Family
ID=31251512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2828088U Pending JPH01136166U (en]) | 1988-03-02 | 1988-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01136166U (en]) |
-
1988
- 1988-03-02 JP JP2828088U patent/JPH01136166U/ja active Pending